Quorum Technologies are delighted to announce the launch of their next generation of large-chamber coaters, available to order from August 2026. The TriQ is a high throughput, large area thin film deposition system whilst DuoQ is a multilayer thin film deposition system. Designed to support a wide range of coating applications, the new systems deliver reliable, reproducible results through advanced automated control and streamlined operation.
The new range will replace the existing QSeries Q300 platform and the Q300 TT, Q300 TD, and Q300 TES models will be discontinued. Quorum remains committed to supporting all QSeries configurations for seven years from the final shipment date. Building on the proven success of the QSeries range, the new generation delivers enhanced functionality, improved process control, and greater operational flexibility.
Introducing the new DuoQ and TriQ
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Increased Stage RPM Range & Torque: The stage can rotate at higher speeds, even with heavier samples. | |
Head Temperature Feedback: Temperature sensors on the heads trigger cooling cycles when required, reducing the risk of target damage. | |
Reduced Cooling Cycle Time: Cooling cycles are now initiated based on temperature feedback and run only for the required duration, reducing unnecessary downtime. | |
Improved Ultimate Vacuum: An ultimate vacuum of 1 × 10-6 mbar, improved from 5 × 10-5 mbar, enables finer-grained coatings for ultra-high-resolution imaging. | |
Improved Shutter Mechanism: Stepper motor allows for more control and more reliable shutter movement. | |
Tall Chamber as Standard: No need to lift the heavy instrument head to increase chamber height for taller samples. | |
Tall & Short Stages and FTM Brackets Supplied as Standard: Enables coating of both tall and short samples. The increased source-to-sample distance can also improve coating uniformity. | |
Full-Range Gauge Supplied as Standard: Provides accurate vacuum monitoring across the full pressure range, where the previous gauge would display “HiVac” at 1 × 10-4mbar | |
Smaller Footprint: At 440mm (W) x 912mm (H) x 551mm (D), requires less bench space, making it easier to accommodate in the laboratory. | |
New Touchscreen Panel with LED Status Indicator: Provides clear indication of the coating process status. The tilting touchscreen also allows for easier viewing and operation. | |
The DuoQ is an automated and versatile large chamber dual sputter coater offering unparalleled ease of use and flexibility based on your application needs. Recommended for controlled thin film deposition for electron microscopy sample preparation and material fabrication.
Features:
Turbomolecular pumped system with ultimate vacuum of 1x10-6 mbar, enabling high quality coatings
Dual head design offering even deposition of thin film coatings across samples up to 6” in diameter
Optimised planetary stages for deposition across 4” and 6” diameter samples
Integrated Film Thickness Monitor (FTM) to control deposition of coating
Intuitive and responsive touchscreen colour panel design
Multi-colour LED visual status indicator offering process updates
Pre-set recipes for standard protocols resulting in sample reproducibility
Customisable recipes enabling users to tailor process parameters to their specific requirements
Compatible with a range of target materials
Comparison:
Model | QSeries Q300 TD | DuoQ |
Vacuum | 5 x 10-5mbar | 1 x 10-6mbar |
Stage | Short 4” wafer stage & gearbox | Short and tall 4” and 6” wafer stages & gearbox supplied & masks for 6” wafer coating as standard |
Screen | Fixed screen | Tilt screen |
Chamber | Short chamber only as standard | Extended chamber for tall and short samples |
FTM | Optional extra | Supplied as standard |
Shutter | Dual solenoid mechanism | Stepper motor mechanism |
Temperature head sensor | Not supplied | Included as standard |
Footprint (W x D x H) | 585 × 470 × 410mm | 440 x 551 x 912mm |
Vacuum connections | Armorvin hose | Stainless steel hose |
Gauge Range | 1000 – 1 x 10-4mbar | 1000 – 5 x 10-9mbar |
Target | 1 x Cr (0.5mm thick x 57mm diameter) 1 x Au (0.1mm thick x 57mm diameter) | 1 x Cr (0.5mm thick x 57mm diameter) 1 x Au (0.1 mm thick x 57mm diameter) |
The TriQ is an automated and versatile large chamber triple head sputter coater offering unparalleled ease of use and flexibility based on your application needs. Recommended for controlled thin film deposition for electron microscopy sample preparation and material fabrication.
Features:
Turbomolecular pumped system with ultimate vacuum of 1x10-6 mbar, enabling high quality coatings
Triple head design offering even deposition of thin film coatings across samples up to 8” in diameter
Optimised planetary stages for deposition across 6” an 8” diameter samples
Integrated Film Thickness Monitor (FTM) to control deposition of coating
Intuitive and responsive touchscreen colour panel design
Multi-colour LED visual status indicator offering process updates
Pre-set recipes for standard protocols resulting in sample reproducibility
Customisable recipes enabling users to tailor process parameters to their specific requirements
Compatible with a range of target materials
Comparison:
Model | QSeries Q300 TT | TriQ |
Vacuum | 5 x 10-5 mbar | 1 x 10-6 mbar |
Stage | Short 8” wafer stage & gearbox | Short and tall 6” and 8” wafer stages & gearbox supplied as standard |
Chamber | Short chamber only as standard | Extended chamber for tall and short samples |
FTM | Optional extra | Supplied as standard |
Shutter | Dual solenoid mechanism | Stepper motor mechanism |
Temperature head sensor | Not supplied | Included as standard |
Footprint (W x D x H) | 585 × 470 × 410mm | 440 x 551 x 912mm |
Vacuum connections | Armorvin hose | Individual power supplies |
Gauge Range | 1000 – 1 x 10-4mbar | 1000 – 5 x 10-9mbar |
Target | 3 x Cr (0.5mm thick x 57mm diameter) | 3 x Cr (0.5mm thick x 57 mm diameter) |